ZYGO ZMI-4104 Measurement Board

ZYGO ZMI-4104
Brand: ZYGO
Model: ZMI-4104, part number 8020-0700-01
Product Name: ZMI-4104 6U VME64x Laser Interferometer Measurement Board
Country of origin: United States
Customs HS code: 90318090 (for reference only)

Dimensions: 263 mm × 58 mm × 28 mm
Weight: 0.43 kg
Main characteristics: Single board supports 4 independent measuring axes, and multiple boards can be modularly expanded up to maximum 64 measurement axes for multi-dimensional positioning system. It achieves position resolution as low as 0.15 nm, supports maximum object moving speed of ±2.55 m/s, and accepts minimum input optical power down to 0.07 µW . It adopts 6U VME64x bus form factor for VME chassis rack installation, compatible with ZYGO 7702,7714,7724 series laser heads . Built-in patented cyclic error reduction function suppresses nonlinear measurement error and improves metrology stability. It provides real-time position data output for upper-level motion controller. Operating temperature ranges from 15℃ to 30℃ under precision-measurement working condition, with non-condensing humidity 30-70%. It integrates hardware self-diagnosis for signal status monitoring, suitable for high-end semiconductor manufacturing and scientific precision measurement applications.